Tīmeklis1.1 The Lam Research Corporation (LRC) Lam AutoEtch 490 is an in-Line cassette to cassette, fully automated, single wafer, double air-locked, parallel plate plasma … TīmeklisPrice: Get a Quote. Refurbished with installation and warranty. System can be reconfigured to match Customer specifications. Request a Quote. Category: Equipment Sales. Reviews (0) There are no reviews yet. Be the first to review “LAM 490 LAM Auto Etch 490”. You must be logged in to post a review.
EMCR870 - MEMS Fabrication - LAM490 Unloading - YouTube
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LAM490 Nitride Etching Process Characterization Report
TīmeklisPRS-800 Tegal 1511e Lam490 Lam 490 Tegal 801 Lam 490 Lam 4500i Lam 490 Lam 490 Lam 4500i Lam 4500i AM 8330 AM8330 Lam 4500i Lam 4500i AM 8330 Lam 4500i Tegal 1511e Lam490 PESiN 1 2、腐蚀菜单简表 工序名称 N 阱腐蚀 UV 坚膜 使用设备 Tegal 1511e Lam490 FUSION150 有源区腐蚀 干法去胶 Tegal 1511e Lam490 … TīmeklisA disruption in power to the Auto Etch (see Figure 2, page 197) will trigger two timer circuits in the controller drawer. The two second timer circuit is designed to protect the Tīmeklis2024. gada 26. maijs · Facts. The LAM 490 AutoEtch is a loadlocked plasma etch system. The system is currently plumbed with Helium, Oxygen, SF6. Personnel. Tool Engineer - Rich Battaglia Process Engineer - Sean O'Brien Super User - Patricia Meller Any of these personnel can certify new users good wine for thanksgiving dinner